Multi-chamber Integrated System

Features

We can customize a multi-process chamber integrated system according to user needs, which is internationally called a multi-chamber Cluster system.

System components: single/multi-chip sampling/storage chamber, conduction chamber, multiple process chambers (different numbers/different functions/same functions, etc.), sputtering/evaporation system ion source auxiliary system, vacuum system, heating/cooling systems, gas transmission systems, fully automatic program control systems, etc.