YIL-400 Online Magnetron Sputtering Coating System

Features

The maximum diameter of the workpiece can be plated to 400mm, and the maximum allowed height of the workpiece is 150mm; within the effective coating area of 400mm in diameter, the coating uniformity is better than ±5%, and the coating repeatability is better than ±3% (the uniformity index is only for flat workpieces)

Layout Dimensions: about 7500mm (W) * 3500mm (D) * 2100mm (H)

Power Supply: 50-70KW

Cooling Water Flow: 65L/min

Air Pressure: 6-7 bar

Gross Weight: 5-6 MT