Spherical vacuum chamber

YM Technology designs and manufactures spherical vacuum chambers to meet the highest standards for industrial and research applications, suitable for both High Vacuum (HV) and Ultra-High Vacuum (UHV) environments.  

Spherical vacuum chambers are commonly integrated into a variety of surface analysis instruments, supporting techniques such as X-ray Photoelectron Spectroscopy (XPS), Auger Electron Spectroscopy (AES), Contact Angle measurements, and Atomic Force Microscopy (AFM).  

These chambers feature multiple access ports of varying sizes to accommodate connections to experimental devices, vacuum measurement gauges, electrical and motion feedthroughs, and analytical instrument accessories. With advanced machining and welding capabilities, YM Technology produces spherical chambers in sizes ranging from 8 inches to 20 inches or larger. All dimensions and tolerances are meticulously crafted to meet UHV standards and customer specifications.

Need a custom vacuum chamber?

YM Technology specializes in the design and manufacturing of customized vacuum chambers, backed by extensive expertise and a professional R&D team. We work closely with customers, utilizing their drawings and specifications to create high-quality vacuum chambers tailored to their unique needs. Our commitment to delivering cost-effective solutions ensures customer satisfaction with every project.

For more information on custom vacuum chambers or other YM vacuum chamber components, contact us and share your drawings. We’re here to assist with your requirements!

Vacuum chambers are primarily utilized in high-precision industries that demand extremely controlled environments, such as ion coating systems, high-vacuum semiconductor equipment, and laboratory apparatus. These chambers play a critical role in processes where maintaining a contamination-free, high-vacuum or ultra-high-vacuum (UHV) environment is essential. For instance, in ion coating applications, vacuum chambers enable the deposition of thin films with exceptional uniformity and adhesion, while in semiconductor manufacturing, they ensure the integrity of delicate processes like etching, deposition, and lithography. Additionally, in laboratory settings, vacuum chambers are indispensable for conducting experiments in fields such as material science, physics, and chemistry, where precise pressure control and minimal environmental interference are paramount. Their versatility and reliability make them a cornerstone in advanced technological and scientific applications.

Our Advantages:

1. We offer customized processing and manufacturing based on customer requirements.  

2. One-on-one professional design and drafting services.  

3. Ability to provide matched vacuum pump systems as specified.  

4. Our chamber products are resistant to high temperatures and corrosion.  

5. Our products meet international standards, ensuring high quality and precision.  

6. Advanced vacuum welding technology is used for assembly and welding.  

7. State-of-the-art vacuum leak detection equipment ensures superior product performance.  

Technical Parameters of Common Vacuum Chambers:  

1. Material: 304 stainless steel, 316L stainless steel, or customer-specified materials.  

2. Operating temperature range: -190°C to +1500°C (water cooling required for high temperatures).  

3. Sealing method: Fluorine rubber "O" rings or oxygen-free copper metal seals.  

If you need to order our vacuum chambers, please contact our professional sales team and provide the following information:

1. Whether the product generates heat during use, the specific high and low temperatures, and whether water or liquid nitrogen cooling is required.  

2. Any special material requirements. Common materials for vacuum chambers include carbon steel, aluminum, 304 stainless steel, and 316 stainless steel.  

3. Connection methods, vacuum pumping methods, and the type of vacuum pump used.  

4. Vacuum level requirements and whether protective or other gases need to be introduced after vacuuming.  

Factory Testing Procedures: 

1. Vacuum leak rate test: Standard leak rate: 1.3×10⁻⁸ Pa·L/s.  

2. Water cooling pressure test: Standard test pressure: 11.6psi, 24hour leak-free test.  

Surface Treatments: 

- Electropolishing

- Sandblasting

- Acid cleaning

- Mirror polishing.