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Vacuum Angle Valves

Vacuum angle valve is a type of valve designed for use in vacuum systems and applications. It is called an "angle valve" because it typically has a 90-degree angle between the input and output ports. This configuration allows for the smooth and efficient flow of gases or liquids while maintaining a high level of vacuum integrity. Vacuum angle valves are commonly used in industries such as semiconductor manufacturing, research facilities, and other high-vacuum applications.

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There are several types of vacuum angle valves available, including manual, pneumatic, and electromagnetic options. Each type has its own specific advantages and disadvantages, depending on the application and the level of vacuum control required.

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Some key features of vacuum angle valves include:

Material: Vacuum angle valves are typically made of materials like stainless steel, which have a low outgassing rate. This helps to maintain the integrity of the vacuum environment.

Sealing: These valves often use elastomer or metal seals to ensure a tight and reliable seal, minimizing leakage and maintaining the vacuum.

Actuation: Vacuum angle valves can be actuated manually, pneumatically, or electromagnetically, depending on the specific application and control requirements.

Design: The internal design of the valve is optimized for minimal turbulence, which aids in maintaining a high level of vacuum and reducing the chance of contaminants being introduced into the system.

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When selecting a vacuum angle valve, it's essential to consider factors such as the required level of vacuum, the type of actuation, the materials used, and the overall design to ensure optimal performance in the specific vacuum application.

 Phneumatic Angle Valves

Product Brief:

GDQ-J type a pneumatic high vacuum flapper valve controls the movement of the cylinder by changing the direction of the air path through the electromagnetic reversing valve, so as to achieve the purpose of opening and closing the valve, thereby connecting or cutting off the air flow in the vacuum pipeline.

The applicable medium is pure air or non-corrosive gas. According to the shaft seal structure, the high vacuum baffle valve can be divided into two types: GDQ-JS rubber shaft seal and GDQ-J/S(b) bellows shaft seal. According to the conduction form, it can be divided into GDQ-J, which is an angle pass type. The bellows can be divided into two types: hydraulic pressure and welding.

(Note: Please install an oil-water separator at the air inlet before the valve to avoid damage caused by water entering the cylinder.)

Specifications:

  • Application range: 10^5 to 1.3×10^-4Pa.m³/s (O-ring seal)

                                        10^5 to 1.3×10^-6Pa.m³/s (Bellow seal)

  • Leakage rate: ≤1.3×10^-6Pa.L/s

  • Working temperature: -25 to +80°C (NBR seal) / -30 to +150°C(FKM seal)

  • Installation Position: Any

  • Air supply pressure: 0.4 to 0.6 Mpa

  • Power:   AC220V/50Hz, (Optional: AC110V, DC24V, DC12V, etc)                                                   

Main Parts Material:

  • Valve body/cap/shaft/bellow: Stainless Steel or Nickel-plated Carbon Steel

  • Seals: perfluoroethylene, NBR, FKM.

KF Pneumatic Angle Valve
KF Pneumatic Angle Valve Size
Model No.
DN
D0
A
C
E
GDQ-J16(KF)
16
19
40
185
60
GDQ-J25(KF)
25
25.4
50
195
60
GDQ-J40(KF)
40
38.1
65
245
78
GDQ-J50(KF)
50
50.8
70
280
88

Overall Size (KF Flange)​

Unit: mm​

CF Pneumatic Angle Valve
CF Pneumatic Angle Valve Size

Overall Size (CF Flange)​

Unit: mm​

Model No.
DN
D0
A
C
E
n-φc
GDQ-J16(CF)
16
19
40
185
60
6-φ4
GDQ-J25(CF)
25
25.4
50
195
60
6-φ6
GDQ-J35(CF)
35
38.1
65
245
78
6-φ6
GDQ-J50(CF)
50
50.8
70
280
88
8-φ8
ISO Pneumatic Angle Valve
ISO Pneumatic Angle Valve Size

Overall Size (ISO Flange)​

Unit: mm​

Model No.
DN
A
C
D1
D
n-φc
Pre-pumping
GDQ-J50
50
70
290
52
75
4-φ9
GDQ-J63
63
88
350
70
95
4-φ9
GDQ-J80
80
98
350
83
110
8-φ9
GDQ-J100
100
108
350
102
130
8-φ9
GDQ-J(S)160
160
158
480
152
180
8-φ11
GDQ-J(S)200
200
180
660
215
240
12-φ11
DN40
GDQ-J(S)250
250
208
680
250
290
12-φ11
DN50
GDQ-J(S)320
320
250
780
322
370
12-φ14
DN63
GDQ-J(S)400
400
330
1210
510
403
16-φ14
DN80
GDQ-J(S)150
150
158
480
152
175
8-φ12
DN40
GDQ-J(S)300
300
250
730
322
360
8-φ14
DN80

KF Manual Angle Valve

  • KF Flange

  • Manually Operated Copper Seal Bonnet with Bellows

  • Stainless steel body surface treatment : below 4”puff polishing

  • Bakeable to 150°C

  • Metal Seal Bonnet : 10-9 mbar vacuum rating KF flange

KF manual angle valve drawings
Model No.
A"(mm)
B"(mm)
C"(mm)
D"(mm)
O.D."(mm)
YM-CU-KF16-M
2.15"(54.6)
5.24"(136.5)
6.01"(157.4)
2.75"(70)
0.75"(19.05)
YM-CU-KF25-M
2.03"(51.6)
5.11"(130.2)
5.89"(151.1)
2.75"(70)
1.00"(25.4)
YM-CU-KF40-M
2.40"(61)
6.62"163.5)
7.85"(196.5)
3.33"(84.6)
1.50"(38.1)
YM-CU-KF50-M
3.40"(86.3)
8.14"(207)
9.95"(252.8)
4.47"(113.6)
2.00"(50.8)

CF Manual Angle Valve

  • CF Flange

  • Manually Operated Copper Seal Bonnet with Bellows

  • Stainless steel body surface treatment : below 4”puff polishing

  • Bakeable to 200°C(open), 150°C(close)

  • Metal Seal Bonnet : approximate 10^-10 mbar vacuum rating CF flange

CF manual angle valve drawings
Model No.
A''(mm)
B''(mm)
C''(mm)
D''(mm)
O.D.''(mm)
YM-CU-CR16-M
2.50"(63.5)
5.58"(145.4)
6.36"(166.3)
2.75"(70)
0.75"(19.05)
YM--CU-CR35-M
2.45"(62.5)
6.68"(165)
7.90"(198)
3.33"(84.6)
1.50"(38.1)
YM-CU-CR63-M
3.38"(85.7)
8.72"(222.2)
10.42"(264.7)
4.62"(117.4)
2.50"(63.5)

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