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Vacuum Gate Valves

Vacuum gate valvea are type of valve specifically designed for use in vacuum systems to control the flow of gas or air. They are used to isolate or regulate the vacuum pressure within a chamber or a section of a vacuum system.

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Vacuum gate valves consist of a gate or blade that can be moved into or out of the flow path of the vacuum system to control the gas flow. When the gate is in the closed position, it blocks the passage, preventing the gas from flowing through. When the gate is in the open position, it creates a clear path for the gas to pass through.

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One of the key features of vacuum gate valves is their ability to provide a tight seal when closed, minimizing gas leakage and maintaining the vacuum level in the system. Vacuum gate valves are designed to provide an airtight seal and are commonly made from materials such as stainless steel or aluminum.

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Vacuum gate valves can be operated manually, typically by turning a handwheel or lever, or they can be automated using pneumatic or electric actuators for remote control. Automated vacuum gate valves offer the advantage of allowing for precise control and integration into larger automated vacuum systems.

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These valves are commonly used in various vacuum applications, including semiconductor manufacturing, research laboratories, vacuum coating processes, and other industrial applications where precise control of vacuum pressure is required.

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Overall, vacuum gate valves play a crucial role in controlling gas flow and maintaining the integrity of vacuum systems, ensuring efficient operation and preventing contamination or pressure fluctuations within the vacuum environment.

Electric Gate Valve

Features:

  • Long life, high reliability: stainless steel shell, solid structure, smooth opening and closing, high bearing capacity of the valve body. The internal moving parts are made of all stainless steel, which is strictly polished. The special design reduces the load on the moving parts, prolongs the service life and improves the stability.

  • High vacuum, metal sealing to the outside world: the sealing methods of the flanges are all sealed with metal wires. Valve plate sealing ring is fluorine rubber. The moving structure uses welded stainless steel bellows to realize the displacement of the valve plate, and realizes no rubber ring sealing to the outside world, effectively reducing the leakage of the valve body and the outgassing of internal materials.

  • Support automatic control: the valve uses the motor to drive the lead screw to move to open and close. The valve has the characteristics of balanced work, reliable sealing, and small vibration when opening and closing. Suitable for automation control equipment.

Specifications:

  • Valve body leakage rate: 1.2*10^-7Pa.L/s

  • Suitable use range: 1*10^-6Pa-1*10^5Pa

  • Volatage: 220V

  • Baking temperature <120°C when closed, <150°C when opened

  • Open or close time: ≤50S

  • Pressure difference on both sides when valve plate opening: <3000Pa

  • Connection method: ISO flange is sealed with FKM O-ring;
                                        CF flange is sealed with copper gasket.

Electric Gate Valve Picture
Electric Gate Valve Size

DN100-250 Electric Gate Valve Size (CF Flange)​

Model No.
DN
H1
H2
L1
L2
L3
K1
K2
S
U
V
W
B
C
L
N-M
CCD-100
100
65
70
71
249
258
141
180
19
100
106
101
152
130.3
86
16-M8
CCD-160
150
65
75
96
340
258
191
230
35
100
106
101
202
181.1
86
20-M8
CCD-200
200
75
75
126
430
304
254
290
55
100
121
101
253
231.9
94
24-M8
CCD-250
250
90
90
155
523
319
310
350
65
100
121
101
305
284
94
32-M8

DN100-250 Electric Gate Valve Size (ISO Flange)​

Model No.
DN
H1
H2
L1
L2
L3
K1
K2
S
U
V
W
B
C
L
N-M
CCD-100
100
65
70
71
249
258
141
180
19
100
106
101
165
145
86
8-M8
CCD-160
150
65
75
96
340
258
191
230
35
100
106
101
225
200
86
8-M10
CCD-200
200
75
75
126
430
304
254
290
55
100
121
101
285
260
94
12-M10
CCD-250
250
90
90
155
523
319
310
350
65
100
121
101
335
310
94
12-M10

Pneumatic Gate Valve

Features:

  • Long life, high reliability: stainless steel shell, solid structure, smooth opening and closing, high bearing capacity of the valve body. The internal moving parts are made of all stainless steel, which is strictly polished. The special design reduces the load on the moving parts, prolongs the service life and improves the stability.​​

  • High vacuum, metal sealing to the outside world: flange metal wire sealing of each part. Welded stainless steel bellows are used to achieve isolation from the external link to ensure smooth opening and closing. Realize the complete metal seal between the valve body and the outside world.

  • Support automatic control: the valve adopts electronically controlled cylinder drive voltage AC 220V, DC 24V optional. Two-way open and close limit position feedback sensors are convenient for automatic system control. (Note: Please install an oil-water separator at the air inlet before the valve to avoid damage caused by water entering the cylinder.)

Specifications:

  • Valve body leakage rate: <10^-8Pa.L/s

  • Suitable use range: 1*10^-7Pa to 1*10^5Pa

  • Air source pressure: 0.4-0.7MPa (4-7kgf/cm2)

  • Intake tube size: O.D.=6mm, I.D.=4mm

  • Baking temperature: Valve body <200°C (in the valve open state),                                                                                     Cylinder and valve body junction <80°C.

  • Open or close time: ≤10S

  • Pressure difference on both sides when valve plate opening: <2000Pa

  • Connection method: ISO flange is sealed with FKM O-ring,
                                        CF flange is sealed with copper gasket.

Pneumatic Gate Valve Picture
Pneumatic Gate Valve Size

DN63-250 Pneumatic Gate Valve Size (CF Flange)​

DN
H1
H2
L1
L2
L3
K1
K2
S
U
V
W
B
C
E*F
63
65
70
56
180
161
112
130
9.5
71
31
49
114
92.1
8*M8
100
65
70
71
249
171
141
180
19
71
31
49
152
130.2
16*M8
150
65
75
96
340
175
191
230
35
71
31
49
202
181.1
20*M8
200
75
75
125.5
430
197
254
290
55
85
42.5
60.5
253
231.9
24*M8
250
90
90
155
523
235
310
350
65
85
42.5
60.5
305
284
32*M8

DN63-400 Pneumatic Gate Valve Size (ISO Flange)​

DN
H1
H2
L1
L2
L3
K1
K2
S
U
V
W
B
C
N-M
63
65
70
56
180
161
112
130
9.5
71
31
49
130
110
4-M8
100
65
70
71
249
171
141
180
19
71
31
49
165
145
8-M8
150
65
75
96
340
175
191
230
35
71
31
49
225
200
8-M10
200
75
75
125.5
430
197
254
290
55
85
42.5
60.5
285
260
12-M10
250
90
90
155
523
235
310
350
65
85
42.5
60.5
335
310
12-M10
320
98
96
180
598
370
360
400
60
94
47
68
425
395
12-M12
400
118
108
233
748
397
466
506
70
112
56
77
510
480
16-M12

Manual Gate Valve

Features:

  • Two-way rotation over-force protection for opening and closing. When the valve is fully opened or fully closed, the internal screw rod is automatically disengaged from the crank handle to avoid damage to the transmission mechanism and valve plate due to excessive force.

  • Long life, high reliability: stainless steel shell, solid structure, smooth opening and closing, high bearing capacity of the valve body. The internal moving parts are made of all stainless steel, which is strictly polished. The special design reduces the load on the moving parts, prolongs the service life and improves the stability.

Specifications:

  • Valve body leakage rate: <10^-8Pa.L/s

  • Suitable use range: 1*10^-7Pa to 1*10^5Pa

  • Baking temperature: Valve body <200°C (in the valve open state),                                                                                     Cylinder and valve body junction <80°C.

  • Open or close time: ≤10S

  • Pressure difference on both sides when valve plate opening: <2000Pa

  • Connection method: ISO flange is sealed with FKM O-ring,
                                        CF flange is sealed with copper gasket.

Manual Gate Valve Picture
Manual Gate Valve Size

DN63-250 Manual Gate Valve Size (CF Flange)​

DN
H1
H2
L1
L2
L3
K1
K2
S
U
V
W
B
C
D
D1
N*M
63
65
70
56
180
152
112
130
9.5
100
50
55
114
92.1
63
70
8*M8
100
65
70
71
249
162
141
180
19
100
50
55
152
130.2
100
102
16*M8
150
65
75
96
340
163
191
230
35
100
50
55
202
181.1
150
153
20*M8
200
75
75
125.5
430
182
254
290
55
100
50
55
253
231.9
200
213
24*M8
250
90
90
155
523
198
310
350
65
100
50
55
305
284
250
261
32*M8

DN63-250 Manual Gate Valve Size (ISO Flange)​

DN
H1
H2
L1
L2
L3
K1
K2
S
U
V
W
B
C
D
D1
N*M
63
65
70
56
180
152
112
130
9.5
100
50
55
114
92.1
63
70
8*M8
100
65
70
71
249
162
141
180
19
100
50
55
152
130.2
100
102
16*M8
150
65
75
96
340
163
191
230
35
100
50
55
202
181.1
150
153
20*M8
200
75
75
125.5
430
182
254
290
55
100
50
55
253
231.9
200
213
24*M8
250
90
90
155
523
198
310
350
65
100
50
55
305
284
250
261
32*M8

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